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https://hdl.handle.net/2440/28787
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Type: | Conference paper |
Title: | Loop closure theory in a deriving linear and simple kinematic model for a 3 DOF parallel micromanipulator |
Author: | Yong, Y. Lu, T. Handley, D. |
Citation: | Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia / Jung-Chih Chiao, Alex J. Hariz, David N. Jamieson, Giacinta Parish, Vijay K. Varadan (eds.) : pp. 57-66 |
Publisher: | SPIE |
Publisher Place: | WWW |
Issue Date: | 2004 |
Series/Report no.: | Proceedings of SPIE--the International Society for Optical Engineering ; 5276. |
ISBN: | 081945169x |
ISSN: | 0277-786X 1996-756X |
Conference Name: | Microelectronics, MEMS, and Nanotechnology (2003 : Perth, Australia) |
Editor: | Faraone, L. Varadan, V. |
Statement of Responsibility: | Yuen Kuan Yong, Tien-Fu Lu, and Daniel C. Handley |
Abstract: | Various types of micro-motion devices have been developed in the past decade for applications including the manipulation of cells in micro-surgery and the assembly of micro-chips in micro-assembly industries. Most of the micro-motion devices are designed using the compliant mechanism concept, where the devices gain their motions through deflections. In addition, closed-loop parallel structures are normally adopted due to better stiffness and accuracy compared to the serial structures. However, the forward kinematics of parallel structures are complex and non-linear; to solve these equations, a numerical iteration technique has to be employed. This iteration process will increase computational time, which is highly undesirable. This paper presents a method of deriving a simple, linear and yet effective kinematic model based on the loop closure theory and the concept of the pseudo-rigid-body model. This method is illustrated with a 3 DOF (degree-of-freedom) micro-motion device. The results of this linear method are compared with a full kinematic model for the same micro-motion system. It is proved that the derived kinematic model in this paper is accurate and the methodology proposed is effective. The static model of the micro-motion device will also be presented. The uncoupling property of the micro-motion systems, based on the static model, will be briefly discussed. |
Rights: | ©2004 COPYRIGHT SPIE--The International Society for Optical Engineering |
DOI: | 10.1117/12.522258 |
Published version: | http://dx.doi.org/10.1117/12.522258 |
Appears in Collections: | Aurora harvest 2 Mechanical Engineering conference papers |
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