Electron interaction cross sections for a low-temperature 'plasma-like' gas mixture

Abstract

Electron interaction cross sections for species found in low-temperature industrial plasma environments are a crucial component to allow for accurate modeling of those plasmas. However, such data are still rarely reported in the literature, due to the complexities of working with such highly reactive species in a laboratory. Here, absolute differential cross section measurements for a ‘plasma-like’ gas mixture, containing CF₃I, CF₃, I₂, I and C₂F₆, are reported.