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https://hdl.handle.net/2440/104070
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Type: | Journal article |
Title: | The microstructure and mechanical properties of tantalum nitride coatings deposited by a plasma assisted bias sputtering deposition process |
Author: | Xu, S. Munroe, P. Xu, J. Xie, Z. |
Citation: | Surface and Coatings Technology, 2016; 307:470-475 |
Publisher: | Elsevier |
Issue Date: | 2016 |
ISSN: | 0257-8972 |
Statement of Responsibility: | Song Xu, Paul Munroe, Jiang Xu, Zong-Han Xie |
Abstract: | Abstract not available |
Keywords: | Tantalum nitride coating; microstructure; mechanical property; nanoporosity; toughness |
Rights: | © 2016 Elsevier B.V. All rights reserved. |
DOI: | 10.1016/j.surfcoat.2016.09.015 |
Grant ID: | http://purl.org/au-research/grants/arc/DP150102417 |
Published version: | http://dx.doi.org/10.1016/j.surfcoat.2016.09.015 |
Appears in Collections: | Aurora harvest 7 Mechanical Engineering publications |
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